100mm×100mm液相外延碲镉汞薄膜技术进展OA北大核心CSTPCD

The Kunming Institute of Physics has achieved significant advancements in the directional growth technology of φ150 mm cadmium zinc telluride(CZT)single crystals,thus enabling the small-scale production of 100 mm×100 mm CZT substrates.The dislocation etch pit density(EPD)is≤4×104cm-2,with precipitate dimensions of<5 μm and a density of<5×103cm-2.In addition,100 mm×100 mm large-area mercury cadium telluride(MCT)thin films were successfully prepared via the surface treatment of large-sized CZT substrates and tellurium-rich horizontal sliding-boat liquid-phase epitaxy.These films exhibit excellent surface quality,with thickness variation within±1.25μm and compositional variation better than±0.0031.This achievement represents the largest area of CZT-based MCT thin films reported internationally and therefore provides a solid foundation for the development of 10 k×10k or larger-scale infrared detectors and the mass production of 4 k×4k scale infrared detector products.