实验科学与技术2024，Vol.22Issue(5)：1-6,27,7.DOI:10.12179/1672-4550.20230201
基于FIB-SEM双束系统制备TEM原位加热样品
Fabrication of In-situ Heating TEM Specimen Based on the FIB-SEM Dual Beam System
摘要
Abstract
Due to the advantages of high accuracy of location and fabrication,the focused ion beam-scanning electron microscopy(FIB-SEM)dual beam system is extensively employed in the preparation of micro/nano-scale specimens used for cross-section preparation,micro/nano-prototyping,transmission electron microscopy(TEM)and atom probe tomography(APT)analyses.However,the development of in-situ characterization techniques in TEM requires higher quality of specimens,among which it is a significant challenge for preparing in-situ heating TEM specimens due to the heating chip geometry,especially during the processes of lift-out,transfer and thinning.Therefore,the FIB-SEM dual beam system is used in this work,and TEM specimens applicable to in-situ heating and characterization are successfully prepared through modifying procedures and parameters based on the traditional fabrication processes.关键词
聚焦离子束-扫描电子显微镜双束系统/原位加热/低电压清扫/样品制备Key words
FIB-SEM dual beam system/in-situ heating/low voltage milling/specimen fabrication分类
金属材料引用本文复制引用
林晓冬,梁雪,李毅丰,陈文霞,鲁波,李强..基于FIB-SEM双束系统制备TEM原位加热样品[J].实验科学与技术,2024,22(5):1-6,27,7.基金项目
国家自然科学基金(52201079) （52201079）
中国博士后科学基金(2021M692018). （2021M692018）
