基于FIB-SEM双束系统制备TEM原位加热样品OA
Fabrication of In-situ Heating TEM Specimen Based on the FIB-SEM Dual Beam System
聚焦离子束-扫描电子显微镜(FIB-SEM)双束系统因具有定位精准、加工精度高等优点,被广泛用于微纳尺度样品的高质量制备,如定点截面加工、纳米图形加工、透射电子显微镜(TEM)和三维原子探针样品等.然而,随着TEM原位表征技术的发展,对样品的制备提出了更高的要求.其中,TEM原位加热样品由于受加热芯片几何形状的限制,在样品的提取、转移和减薄等工序上具有较高的技术难度.利用FIB-SEM双束系统,在传统TEM样品制备工艺基础上,通过合理改进制备流程和参数,调整样品提取和减薄顺序,并配合低电压清扫工艺,成功制备了可用于原位加热和表征的TEM样品.
Due to the advantages of high accuracy of location and fabrication,the focused ion beam-scanning electron microscopy(FIB-SEM)dual beam system is extensively employed in the preparation of micro/nano-scale specimens used for cross-section preparation,micro/nano-prototyping,transmission electron microscopy(TEM)and atom probe tomography(APT)analyses.However,the development of in-situ characterization techniques in TEM requires higher quality of specimens,among which it is a significant challenge for preparing in-situ heating TEM specimens due to the heating chip geometry,especially during the processes of lift-out,transfer and thinning.Therefore,the FIB-SEM dual beam system is used in this work,and TEM specimens applicable to in-situ heating and characterization are successfully prepared through modifying procedures and parameters based on the traditional fabrication processes.
林晓冬;梁雪;李毅丰;陈文霞;鲁波;李强
上海大学分析测试中心,上海 200444
金属材料
聚焦离子束-扫描电子显微镜双束系统原位加热低电压清扫样品制备
FIB-SEM dual beam systemin-situ heatinglow voltage millingspecimen fabrication
《实验科学与技术》 2024 (005)
1-6,27 / 7
国家自然科学基金(52201079);中国博士后科学基金(2021M692018).
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