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A novel self-alignment method for high precision silicon diffraction microlens arrays preparation and its integration with infrared focal plane arrays

HOU Zhi-Jin CHEN Yan WANG Xu-Dong WANG Jian-Lu CHU Jun-Hao

红外与毫米波学报2024，Vol.43Issue(5)：P.589-594,6.

红外与毫米波学报2024，Vol.43Issue(5)：P.589-594,6.DOI:10.11972/j.issn.1001-9014.2024.05.001

A novel self-alignment method for high precision silicon diffraction microlens arrays preparation and its integration with infrared focal plane arrays

HOU Zhi-Jin ¹CHEN Yan ¹WANG Xu-Dong ²WANG Jian-Lu ¹CHU Jun-Hao¹

作者信息

1. State Key Laboratory of Photovoltaic Science and Technology,Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception,Institute of Optoelectronics,Fudan University,Shanghai 200433,China
2. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
折叠

摘要

关键词

self-alignment/diffraction microlens arrays/high precision/integration/Si/IRFPAs

分类

信息技术与安全科学

引用本文复制引用

HOU Zhi-Jin,CHEN Yan,WANG Xu-Dong,WANG Jian-Lu,CHU Jun-Hao..A novel self-alignment method for high precision silicon diffraction microlens arrays preparation and its integration with infrared focal plane arrays[J].红外与毫米波学报,2024,43(5):P.589-594,6.

基金项目

Supported by the National Natural Science Foundation of China(NSFC 62105100) （NSFC 62105100）

the National Key research and development program in the 14th five year plan(2021YFA1200700)。（2021YFA1200700）

红外与毫米波学报

OA北大核心CSTPCD

ISSN：1001-9014

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