红外与毫米波学报2024,Vol.43Issue(5):P.595-602,8.DOI:10.11972/j.issn.1001-9014.2024.05.002
Research on the correlation between the dual diffusion behavior of zinc in InGaAs/InP single-photon avalanche photodiodes and device performance
摘要
关键词
InGaAs/InP single-photon avalanche photodiode/diffusion depth/Znic diffusion/dark count rate分类
信息技术与安全科学引用本文复制引用
LIU Mao-Fan,YU Chun-Lei,MA Ying-Jie,YU Yi-Zhen,YANG Bo,TIAN Yu,BAO Peng-Fei,CAO Jia-Sheng,LIU Yi,LI Xue..Research on the correlation between the dual diffusion behavior of zinc in InGaAs/InP single-photon avalanche photodiodes and device performance[J].红外与毫米波学报,2024,43(5):P.595-602,8.基金项目
Supported by Shanghai Natural Science Foundation(22ZR1472600). (22ZR1472600)