Ultra-low loss silicon nitride becomes even coolerOACSTPCD
Ultra-low loss silicon nitride becomes even cooler
Dawn T.H.Tan;Xavier X.Chia
Photonics Devices and Systems Group,Singapore University of Technology and Design,Singapore,Singapore||Institute of Microelectronics,Agency for Science Technology and Research(A*STAR),Singapore,SingaporePhotonics Devices and Systems Group,Singapore University of Technology and Design,Singapore,Singapore
《光：科学与应用（英文版）》 2024 (10)
1997-1999,3
D.T.H.T.acknowledges funding from the A*STAR MTC Grant(M21K2c0119),Ministry of Education ACRF Tier 2 Grant(T2EP50121-0019),National Research Foundation Investigatorship(NRF-NRFI08-2022-0003),Quantum Engineering Programme 2.0 grant(NRF2022-QEP2-01-P08)and A*STAR Institute of Microelectronics(C220415015).
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