光:科学与应用(英文版)2024,Vol.13Issue(10):1997-1999,3.DOI:10.1038/s41377-024-01576-1
Ultra-low loss silicon nitride becomes even cooler
Ultra-low loss silicon nitride becomes even cooler
摘要
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Dawn T.H.Tan,Xavier X.Chia..Ultra-low loss silicon nitride becomes even cooler[J].光:科学与应用(英文版),2024,13(10):1997-1999,3.基金项目
D.T.H.T.acknowledges funding from the A*STAR MTC Grant(M21K2c0119),Ministry of Education ACRF Tier 2 Grant(T2EP50121-0019),National Research Foundation Investigatorship(NRF-NRFI08-2022-0003),Quantum Engineering Programme 2.0 grant(NRF2022-QEP2-01-P08)and A*STAR Institute of Microelectronics(C220415015). (M21K2c0119)