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Design and characterization of a multi-ring nested CMUT array for hydrophone

Licheng Jia Rihui Xue Fansheng Meng

Journal of Semiconductors2024，Vol.45Issue(11)：P.58-62,5.

Journal of Semiconductors2024，Vol.45Issue(11)：P.58-62,5.DOI:10.1088/1674-4926/24060007

Design and characterization of a multi-ring nested CMUT array for hydrophone

Licheng Jia ¹Rihui Xue ¹Fansheng Meng¹

作者信息

1. The Key Laboratory of Instrumentation Science and Dynamic Measurement,North University of China,Taiyuan 030051,China
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摘要

关键词

cmut array/mirco-electro-mechanical systems(mems)/receiving sensitivity/non-linearity

分类

通用工业技术

引用本文复制引用

Licheng Jia,Rihui Xue,Fansheng Meng..Design and characterization of a multi-ring nested CMUT array for hydrophone[J].Journal of Semiconductors,2024,45(11):P.58-62,5.

基金项目

supported in part by the National Natural Science Foundation of China under Grant 61927807,62320106011,and 62304208 （）

China Postdoctoral Science Foundation under Grant 2023M733277 and2024T170848。（）

Journal of Semiconductors

OACSTPCDEI

ISSN：1674-4926

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