电子科技大学学报2024，Vol.53Issue(6)：852-861,10.DOI:10.12178/1001-0548.2023010
MEMS压阻式压力传感器梁-膜-三岛膜结构设计与优化
Design and Optimization of a Beam-Membrane-Three-Island Structure of MEMS Piezoresistive Pressure Sensor
郭威 1李辉 1罗登玲 1刘细辉 1邹力 1李绍荣 1郭小伟 2唐普英1
作者信息
- 1. 电子科技大学光电科学与工程学院,成都 610054
- 2. 电子科技大学光电科学与工程学院,成都 610054||电子科技大学长三角研究院(湖州),湖州 313001
- 折叠
摘要
Abstract
The traditional piezoresistive pressure sensor has high sensitivity but also high nonlinearity.To solve this problem,this paper designs a new piezoresistive pressure sensor with a sensing diaphragm of beam-membrane-three-island structure.By designing three square island structures on the sensing diaphragm,the linearity and overload resistance of the sensor are improved.At the same time,the stress concentration zone is formed by the short narrow beam structure designed on the sensitive diaphragm to ensure the high sensitivity of the pressure sensor.The structure is simulated and analyzed,the mathematical model between the size parameters of the pressure film and the mechanical properties is established,and the parameters of the mathematical model are analyzed,fitted and solved.Finally,the extreme values under the nonlinear constraint conditions are solved to complete the size optimization,so that the performance of the sensor is improved.The optimization results show that the sensitivity of the pressure sensor is improved and the mechanical properties are good under the condition of ensuring the low nonlinearity of the sensor.关键词
MEMS/压力传感器/有限元仿真/设计与优化Key words
MEMS/pressure sensor/finite element simulation/design and optimization分类
信息技术与安全科学引用本文复制引用
郭威,李辉,罗登玲,刘细辉,邹力,李绍荣,郭小伟,唐普英..MEMS压阻式压力传感器梁-膜-三岛膜结构设计与优化[J].电子科技大学学报,2024,53(6):852-861,10.
