光学精密工程2024，Vol.32Issue(19)：2911-2920,10.DOI:10.37188/OPE.20243219.2911
新型流磁巨量转移用永磁偏置定位磁针
Permanent magnet bias positioning magnetic needle for novel fluid magnetic mass transfer
摘要
Abstract
To improve the efficiency and yield of Mini/Micro LED mass transfer and self-assembly,a new positioning magnetic needle using a permanent magnet+electromagnetic magnetic field coupling is pro-posed.An electromagnetic bias coil is designed to precisely control the magnetic force on the needle's up-per surface for accurate chip grasping.Magnetic circuit analysis establishes a mathematical model for the magnetic needle structure,identifying parameters affecting the magnetic flux density in the air gap.The fi-nite element method optimizes these parameters,increasing the Bmax on the needle's upper surface from 57 mT to 68 mT,a 19.2%improvement,and enhancing the peak-to-valley variation rate δ from 50.8%to 70.5%.Based on these optimizations,a permanent magnet bias positioning magnetic needle device was developed.Tests show the optimized needle achieves a Bmax of 60 mT and a δ of 66.6%,efficiently securing thousands of chips per minute.This meets precise chip grasping requirements and enhances the yield of self-assembly mass transfer technology when combined with fluid.关键词
mini/micro LED/巨量转移/永磁偏置/定位磁针/优化设计Key words
mini/micro LED/Mass Transfer(MT)/permanent magnet bias/positioning magnetic nee-dle/optimized design分类
电子信息工程引用本文复制引用
刘强,焦飞腾,孙海威,牛萍娟,王子羲..新型流磁巨量转移用永磁偏置定位磁针[J].光学精密工程,2024,32(19):2911-2920,10.基金项目
北京市属高等学校高水平科研创新团队建设支持计划资助项目(No.BPHR20220110) （No.BPHR20220110）
