摘要
Abstract
In recent years,China's integrated circuit industry has developed rapidly,and enterprises have gradually formed large-scale clusters in industrial parks.However,its manufacturing process involves various types of chemicals and produces a variety of toxic and harmful gases,which have a significant impact on the regional environment.Therefore,conducting a good atmospheric environmental impact assessment is an important basis for ensuring the environmental feasibility of project construction.The atmospheric environmental impact assessment is elaborated from the aspects of process waste gas generation,waste gas emission standards,and waste gas treatment measures,and the main issues are explored that industry environmental impact assessments should pay attention to,thus providing reference for environmental impact assessment practitioners.关键词
集成电路制造工业/工艺废气/大气/环境影响评价Key words
integrated circuit manufacturing industry/process waste gas/atmosphere/environmental impact assessment分类
信息技术与安全科学
