四川大学学报（自然科学版）2024，Vol.61Issue(6)：3-8,6.DOI:10.19907/j.0490-6756.2024.060001
二硫化钼同质结构筑与自供电光电效应研究
Fabrication of MoS2 homojunction and study of self-powered optoelectronic effect
摘要
Abstract
Two-dimensional molybdenum disulfide(2D MoS2)self-powered photodetectors show significant potential in applications such as the Internet of Things,biomedical engineering,and the military,thanks to their advantages in small size,low weight,and low power consumption(SWaP).Ion implantation,a process capable of manipulating semiconductor band structures,is an effective method for constructing homojunctions that enable self-powered photoelectric effects.However,creating homojunctions in atomically thin 2D MoS₂presents challenges,as implantation can damage or even erode the crystal structure.In this work,a MoS2 van der Waals homojunction photodetector with self-powered optoelectronic effects was successfully fabricated by optimizing the implantation process.The photodetector achieved an ideal factor of 0.98 and demonstrated a responsivity of 11 mA/W under 450 nm light illumination,exhibiting favorable transport properties and an el-evated photoresponse among 2D self-powered photodetectors.This study provides valuable guidance for the application of established semiconductor processing techniques in the emerging field of 2D photodetectors.关键词
自供电光电探测器/二硫化钼/离子注入/范德瓦尔同质结Key words
Self-powered photodetector/MoS2/Implantation/van der Waals homojunction分类
信息技术与安全科学引用本文复制引用
王超,郝昕,姚梦麒,王江,刘源,卢彦岭,谭超,王泽高..二硫化钼同质结构筑与自供电光电效应研究[J].四川大学学报（自然科学版）,2024,61(6):3-8,6.基金项目
中国兵器工业集团有限公司激光器件技术重点实验室开放基金(KLLDT202104) （KLLDT202104）
激光雷达与器件技术实验室开放课题(LLD2023-006) （LLD2023-006）
