四川大学学报（自然科学版）2024，Vol.61Issue(6)：24-30,7.DOI:10.19907/j.0490-6756.2024.060004
可用于氧气传感器的新型高离子电导YSZ薄膜制备方法
A new method for preparing YSZ thin films with fast ionic conductivity for oxygen sensors
摘要
Abstract
The YSZ thin film oxygen sensors based on MEMS is the first choice of oxygen sensor because of its miniaturization and integration advantages.It is the key of integration and miniaturization to effectively re-duce the working temperature of the YSZ thin films and improve the ionic conductivity.In this paper,the YSZ thin films were prepared by pulsed laser deposition technology in high vacuum.Until the thickness of the YSZ thin films reaches 200 nm by alternating experiment of deposition and in-situ oxygen annealing.We stud-ied the effects of deposition and annealing temperature on the structure,composition,electrical properties and oxygen sensing properties of the YSZ thin films.The results show that the cubic phase diffraction peak inten-sity of YSZ thin films and the ionic conductivity increases gradually with the increase of annealing tempera-ture.The YSZ thin films have the highest ionic conductivity and lower activation energy,which are 2.53 S/cm(Tm=873 K)and 0.227 eV,respectively,when the temperatures reach 753 K.The results show that the working temperature of YSZ thin film can be reduced from 1073 K to 873 K using PLD method,which effectively explores the development of micro YSZ thin film oxygen sensors based on MEMS.关键词
脉冲激光沉积/YSZ薄膜/离子电导/氧气敏感特性Key words
Pulsed laser deposition/Yttria Stabilized Zirconia(YSZ)thin film/Ionic conductance/Oxygen sensitivity分类
机械制造引用本文复制引用
马可贞,张靖松..可用于氧气传感器的新型高离子电导YSZ薄膜制备方法[J].四川大学学报（自然科学版）,2024,61(6):24-30,7.基金项目
顶旭(苏州)微控技术有限公司内部立项基金 （苏州）
