量子电子学报2024，Vol.41Issue(6)：872-880,9.DOI:10.3969/j.issn.1007-5461.2024.06.004
大口径米量级的激光光束质量测量装置标定方法研究
Research on calibration method of large-aperture meter-scale laser beam quality measuring device
摘要
Abstract
With the increasing application of laser,the quality measurement of laser beams with meter-sacle large-aperture is of important research value.To avoid the influence of atmosphere,the wavefront measurement method is gernerally used to directly measure the quality of laser beams with meter-scale large-aperture at the outlet of laser systems.In order to achieve accurate measurement,it is necessary to calibrate the zero point of the meter-scale large-aperture measurement system first.A scanning calibration method for the large-aperture measurement system is proposed in this work using a small aperture calibration light source.The errors of the beam spot centroid shift caused by residual errors of the parallelism of the calibration light source under different scanning mode are analyzed,and the influence of residual errors of the parallelism of the calibration light source on the measurement accuracy in different scanning mode is simulated and analyzed.According to the wavefront restoration results,the unidirectional scanning mode is selected,and it is specified that the residual error of the parallelism of the calibration light source is not greater than 5 μrad when the aperture of scale validation model system is 127 mm,while the residual error of the parallelism of the calibrated light source for the actual measurement system with 1.27 m aperture is not greater than 0.5 μrad.关键词
激光技术/光束质量/大口径米量级的测量系统/零点标定/平行度残余误差Key words
laser technology/beam quality/measurement system of large-aperture meter-scale/zero calibration/parallelism residual error分类
信息技术与安全科学引用本文复制引用
朱菲,侯再红,王港雨,秦来安,靖旭,吴德成..大口径米量级的激光光束质量测量装置标定方法研究[J].量子电子学报,2024,41(6):872-880,9.基金项目
国家自然科学基金重点项目(41875033) （41875033）
