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Advancing Al-doped ZnO thin films structural,optical and electrical properties of low temperature PET substrates via flash lamp annealing

Juwon Lee Chang-Hyeon Jo Gwangseop Lee Min-Sung Bae Slawomir Prucnal Shengqiang Zhou Muhammad Zubair Khan Osama Gohar Mohsin Saleem Jung-Hyuk Koh

Journal of Semiconductors2024，Vol.45Issue(12)：P.47-60,14.

Journal of Semiconductors2024，Vol.45Issue(12)：P.47-60,14.DOI:10.1088/1674-4926/24070005

Advancing Al-doped ZnO thin films structural,optical and electrical properties of low temperature PET substrates via flash lamp annealing

Juwon Lee ¹Chang-Hyeon Jo ¹Gwangseop Lee ¹Min-Sung Bae ¹Slawomir Prucnal ²Shengqiang Zhou ²Muhammad Zubair Khan ³Osama Gohar ⁴Mohsin Saleem ⁵Jung-Hyuk Koh⁶

作者信息

1. Graduate School of Intelligent Energy and Industry,Chung-Ang University,Heukseok-ro,Seoul,Republic of Korea
2. Helmholtz-Zentrum Dresden-Rossendorf,Institute of Ion Beam Physics and Materials Research,Bautzner Landstraße 400,01328,Dresden,Germany
3. Department of Materials Science and Engineering,Pak-Austria Fachhochschule:Institute of Applied Sciences and Technology,Mang,Haripur,22621,Khyber Pakhtunkhwa,Pakistan
4. Department of Mechanical and Electrical Systems Engineering,Graduate School of Engineering,Kyoto University of Advanced Science,Gotanda-cho,Yamanouchi,Ukyo-ku,Kyoto 615-8577,Japan
5. School of Chemical and Materials Engineering(SCME),National University of Sciences&Technology(NUST),H-12,Islamabad 44000,Pakistan
6. Graduate School of Intelligent Energy and Industry,Chung-Ang University,Heukseok-ro,Seoul,Republic of Korea School of Electrical and Electronic Engineering,Chung-Ang University,Seoul,Republic of Korea
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摘要

关键词

flash lamp annealing/AZO/thin film/PET/sputtering

分类

通用工业技术

引用本文复制引用

Juwon Lee,Chang-Hyeon Jo,Gwangseop Lee,Min-Sung Bae,Slawomir Prucnal,Shengqiang Zhou,Muhammad Zubair Khan,Osama Gohar,Mohsin Saleem,Jung-Hyuk Koh..Advancing Al-doped ZnO thin films structural,optical and electrical properties of low temperature PET substrates via flash lamp annealing[J].Journal of Semiconductors,2024,45(12):P.47-60,14.

基金项目

supported by the MOTIE (Ministry of Trade,Industry,and Energy)in Korea,under the Fostering Global Talents for Innovative Growth Program (P0017308) （Ministry of Trade,Industry,and Energy）

supervised by the Korea Institute for Advancement of Technology (KIAT) （KIAT）

supported by the MSIT (Ministry of Science and ICT),Korea,under the ITRC (Information Technology Research Center)support program (IITP-2024-2020-0-01655) （Ministry of Science and ICT）

supervised by the IITP (Institute of Information and Communications Technology Planning and Evaluation). （Institute of Information and Communications Technology Planning and Evaluation）

Journal of Semiconductors

OACSTPCDEI

ISSN：1674-4926

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