Journal of Semiconductors2024，Vol.45Issue(12)：P.11-15,5.DOI:10.1088/1674-4926/24110020
PZT photonic materials and devices platform
Yujun Xie 1Peng Wang 1Hongyan Yu 2Chengyang Zhong 3Jie Peng 3Jungan Wang 2Chen Yang 2Yu Han 4Ang Li 3Zehao Guan 3Feng Qiu 2Ming Li3
作者信息
- 1. Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
- 2. Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China
- 3. Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100190,China School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
- 4. Juhe Electro-optic(Hangzhou)Tech.Co.Ltd.Hangzhou 310024,China
- 折叠
摘要
关键词
processes/compatibility/complementary分类
通用工业技术引用本文复制引用
Yujun Xie,Peng Wang,Hongyan Yu,Chengyang Zhong,Jie Peng,Jungan Wang,Chen Yang,Yu Han,Ang Li,Zehao Guan,Feng Qiu,Ming Li..PZT photonic materials and devices platform[J].Journal of Semiconductors,2024,45(12):P.11-15,5.基金项目
supported by the National Natural Science Foundation of China (Grant Nos.61925505 and 62405070) （Grant Nos.61925505 and 62405070）
"Pioneer"and"Leading Goose"R&D Program of Zhejiang Province (Grant No.2024C01112) （Grant No.2024C01112）
National Key Research and Development Program of China (Grant No.2023YFB2807100). （Grant No.2023YFB2807100）
