MEMS速率陀螺仪力平衡控制回路相位误差分析与验证OA北大核心CSTPCD

In order to clarify the influence of phase error on the static and dynamic performance of MEMS rate gyroscopes based on the force to rebalance(FTR)measurement mode,the model of FTR rate con-trol loop with phase error was constructed to analyze the influence of different phase errors on the dynamic and static performance.Firstly,the basic principle of the gyroscope using FTR rate mode was introduced,and the effect of phase error on the driving modes was briefly analyzed.Secondly,the model of FTR rate control loop containing phase errors in the feedback and forward channels was proposed,and an equivalent transformation of the model was performed.Thirdly,the effects of different types of phase errors on the dynamic and static performance of the gyroscope were analyzed according to the above model.Finally,the corresponding experimental validation was conducted.Experimental results indicate that the stability of the two-hourly measured value of the phase error in the feedback channel is 0.094 9,and the error only chang-es the value of scale factor;the bias and bias drift values before and after the compensation of the phase er-ror in the forward channel are reduced by 4.8 and 2.9 times,respectively,and the bias instability and an-gular random walking are improved by 0.8 and 0.9 times,respectively.The phase error in the feedback channel can be compensated by the calibration,and this error only affects the value of the scale factor,and does not affect the bias and bandwidth performance;the phase error in the forward channel seriously re-stricts the static performance,but does not affect the dynamic performance at room temperature.