光学精密工程2024，Vol.32Issue(20)：3059-3070,12.DOI:10.37188/OPE.20243220.3059
MEMS速率陀螺仪力平衡控制回路相位误差分析与验证
Analysis and verification of phase error in force balance control loop of MEMS rate gyroscope
摘要
Abstract
In order to clarify the influence of phase error on the static and dynamic performance of MEMS rate gyroscopes based on the force to rebalance(FTR)measurement mode,the model of FTR rate con-trol loop with phase error was constructed to analyze the influence of different phase errors on the dynamic and static performance.Firstly,the basic principle of the gyroscope using FTR rate mode was introduced,and the effect of phase error on the driving modes was briefly analyzed.Secondly,the model of FTR rate control loop containing phase errors in the feedback and forward channels was proposed,and an equivalent transformation of the model was performed.Thirdly,the effects of different types of phase errors on the dynamic and static performance of the gyroscope were analyzed according to the above model.Finally,the corresponding experimental validation was conducted.Experimental results indicate that the stability of the two-hourly measured value of the phase error in the feedback channel is 0.094 9,and the error only chang-es the value of scale factor;the bias and bias drift values before and after the compensation of the phase er-ror in the forward channel are reduced by 4.8 and 2.9 times,respectively,and the bias instability and an-gular random walking are improved by 0.8 and 0.9 times,respectively.The phase error in the feedback channel can be compensated by the calibration,and this error only affects the value of the scale factor,and does not affect the bias and bandwidth performance;the phase error in the forward channel seriously re-stricts the static performance,but does not affect the dynamic performance at room temperature.关键词
MEMS速率陀螺仪/力平衡控制/相位误差/零偏性能/标度因数/带宽Key words
MEMS rate gyroscope/force-to-rebalance control/phase error/bias performance/scale fac-tor/bandwidth分类
计算机与自动化引用本文复制引用
高阳,贾佳,孟琳,阮志虎,曹慧亮..MEMS速率陀螺仪力平衡控制回路相位误差分析与验证[J].光学精密工程,2024,32(20):3059-3070,12.基金项目
国家重点研发计划"智能传感器"重点专项(No.2022YFB3205000) （No.2022YFB3205000）
国家自然基金重点联合项目(No.U2230206) （No.U2230206）
江苏省高等学校基础科学(自然科学)研究项目(No.24KJB510007) （自然科学）
南京工程学院创新基金面上项目(No.CKJB202306) （No.CKJB202306）
