船电技术2025，Vol.45Issue(1)：29-34,6.
微机械开关传感器的集成电路应用研究
Research on integrated circuit application of micro-mechanical switch sensors
韩科 1刘雪飞 1李奕龙 1李浩楠1
作者信息
- 1. 中国人民解放军海军潜艇学院,山东 青岛 266042
- 折叠
摘要
Abstract
Sensors based on micro-mechanical switch structures,as a product of the combination of micro-machining technology and traditional electrochemical sensor technology,have already demonstrated their unique advantages in the next generation of sensor technology.This paper conducts comprehensive tests on various micro-mechanical switch sensors with the aim of comparing the performance and advantages of different miniature sensors,providing support for further exploration of silicon-based board micro-machining technology,and providing new exploration ideas for the development of ship switch devices using micro-mechanical switch sensors.The test research shows that various sensors have different advantages and characteristics in terms of reaction speed,sample volume requirements,sensitivity and human implant monitoring.Their performance has been significantly improved as the size of the components has been reduced.With the continuous improvement of silicon-based micro-machining technology,the size of the sensor components is expected to be further reduced,which will drive the further development of electrochemical sensor technology.关键词
微机械开关/传感器/加工Key words
micromechanical switch/sensor/process分类
计算机与自动化引用本文复制引用
韩科,刘雪飞,李奕龙,李浩楠..微机械开关传感器的集成电路应用研究[J].船电技术,2025,45(1):29-34,6.
