太阳能Issue(12)：72-78,7.DOI:10.19911/j.1003-0417.tyn20231213.01
n型"SE+TOPCon"太阳电池硼扩散氧化推结过程中的湿氧化工艺研究
STUDY ON WET OXIDATION PROCESS DURING BORON DIFFUSION OXIDATION PUSH JUNCTION PROCESS OF n-TYPE"SE+TOPCon"SOLAR CELLS
陈骏 1李兵 1赵增超 1申凯琳 1刘湘祁 1邓新新1
作者信息
- 1. 湖南红太阳光电科技有限公司,国家光伏装备工程技术研究中心,长沙 410000
- 折叠
摘要
Abstract
This paper aims to explore the role of wet oxidation process in the preparation process of n-type TOPCon solar cells using stacked selective emitter(SE)technology(hereinafter referred to as"n-type'SE+TOPCon'solar cells").The wet oxidation process is added to the oxidation push junction process of boron diffusion technology in the preparation of such solar cells.Through experimental comparison of dry oxidation process and wet oxidation process,the influence of wet oxidation process on the thickness of BSG layer,the square resistance,boron doping concentration and junction depth of heavily doped and lightly doped regions,as well as the passivation effect of lightly doped region and the contact effect of heavily doped region are studied.The research results show that:1)The thickness of BSG layer grown by wet oxidation process at 1020℃process temperature can reach the level of dry oxidation process at 1050℃process temperature,but the process temperature of wet oxidation process is reduced by 30℃,which can significantly reduce energy consumption and extend the service life of quartz products.2)Compared with the dry oxidation process,the boron doping concentration in the lightly doped region obtained by the wet oxidation process is slightly higher,the doping amount is lower,and the hidden open circuit voltage is slightly higher.The boron doping concentration in the heavily doped region is slightly higher and the junction depth increases,thereby improving the contact resistivity of the silicon wafer.3)The filling factor of the n-type"SE+TOPCon"solar cell prepared by wet oxidation process is 0.23%higher than that prepared by dry oxidation process,and its photoelectric conversion efficiency reaches 25.61%.关键词
TOPCon太阳电池/选择性发射极/湿氧化工艺/氧化推结/轻掺杂区/重掺杂区/方阻/光电转换效率Key words
TOPCon solar cells/SE/wet oxidation process/oxidation push junction/lightly doped region/heavily doped region/sheet resistance/photoelectric conversion efficiency分类
信息技术与安全科学引用本文复制引用
陈骏,李兵,赵增超,申凯琳,刘湘祁,邓新新..n型"SE+TOPCon"太阳电池硼扩散氧化推结过程中的湿氧化工艺研究[J].太阳能,2024,(12):72-78,7.
