中国电机工程学报2024，Vol.44Issue(24)：9834-9843,中插27,11.DOI:10.13334/j.0258-8013.pcsee.231974
粗微叠层式硅片台数据驱动MIMO前馈控制
Data-driven MIMO Feedforward Control for Ultra-precision Dual-stroke Wafer Stage
摘要
Abstract
The wafer stage carrying silicon for image exposure in the lithography machine is a typical multi-input multi-output(MIMO)ultra-precision motion system.MIMO feedforward control technology is the critical link to suppress coupling errors of each degree of freedom.For the dual-stroke wafer stage with a short-stroke stage(SS)and a long-stroke stage(LoS),an MIMO feedforward strategy based on the master-slave control architecture is proposed.The feedforward adopts a linear parameterization structure and uses the differential unit as the basis function to convert the controller parameter tuning problem into a convex optimization problem.Furthermore,the global optimal parameter tuning method and the unbiased gradient estimation are given.Through multi-die exposure trajectory tracking experiments,the rapid convergence performance of the proposed parameter tuning method is verified.Experimental results demonstrate that the proposed method can effectively reduce the coupling trajectory tracking errors of SS and the relative errors between SS and LoS.关键词
多输入多输出(MIMO)系统/MIMO前馈/数据驱动/参数整定/粗微叠层/硅片台/超精密运动系统Key words
multi-input multi-output(MIMO)system/MIMO feedforward/data-driven/controller parameter tuning/dual-stage/wafer stage/ultra-precision motion system分类
信息技术与安全科学引用本文复制引用
刘涛,杨开明,朱煜..粗微叠层式硅片台数据驱动MIMO前馈控制[J].中国电机工程学报,2024,44(24):9834-9843,中插27,11.基金项目
国家科技重大专项(2017ZX02102004).National Science and Technology Major Project of China(2017ZX02102004). （2017ZX02102004）
