光学精密工程2024，Vol.32Issue(21)：3174-3183,10.DOI:10.37188/OPE.20243221.3174
复合腔高温法珀加速度传感器的设计与实验
Design and experiment of high temperature Fabry-Perot acceleration sensor with composite cavity
摘要
Abstract
This study presents the development of a novel MEMS-based Fabry-Perot accelerometer with a composite cavity,designed for high-sensitivity,small-range vibration monitoring in the extreme conditions(500℃,2 MPa)of lead-bismuth reactors.To optimize the sensor's performance,a detailed analysis was conducted using a mechanical model of a cross-beam and mass block structure to evaluate the influence of structural parameters on sensitivity,measurement range,and resonant frequency.This analysis guided the determination of optimal design parameters for the sensitive structure.The chip structure,featuring a composite cavity,was fabricated through a precise double-sided bonding process,ensuring the achieve-ment of the required mechanical properties and thermal stability.Following fabrication,the sensor was as-sembled and manufactured to conform to stringent design specifications.A dedicated testing platform was established to evaluate the sensor's dynamic characteristics,sensitivity,operational range,and thermal performance under high-temperature conditions.Experimental results demonstrated the sensor's robust functionality,maintaining performance at temperatures up to 500℃,and achieving a high sensitivity of 7.69 nm/g within a frequency range of 2-30 Hz.The device provides a measurement range from-11g to+11g with a resolution of 0.04g,enabling precise detection of flow-induced vibrations critical for wear monitoring in reactor components.These attributes enable effective assessment of the wear state of fuel as-semblies,a key factor in reactor safety and operational reliability.The accelerometer's high sensitivity and operational reliability underscore its potential as an advanced tool for early detection of vibration-induced component wear in extreme environments.This development marks a significant contribution to improv-ing reactor safety and efficiency,offering a powerful solution for proactive maintenance and monitoring in lead-bismuth reactors.关键词
加速度传感器/复合腔/高温/振动测量Key words
accelerometer/composite cavity/high temperature/vibration measurement分类
信息技术与安全科学引用本文复制引用
秦锋,郑渟渟,谭佳航,王宁..复合腔高温法珀加速度传感器的设计与实验[J].光学精密工程,2024,32(21):3174-3183,10.基金项目
国家自然科学基金面上项目(No.51875067) （No.51875067）
