电子科技2025，Vol.38Issue(1)：59-72,14.DOI:10.16180/j.cnki.issn1007-7820.2025.01.009
硅基光波导分束器的研究进展
Research Progress of Silicon-Based Optical Waveguide Beam Splitter
摘要
Abstract
As an important device in photonic integrated circuit,optical waveguide devices can be divided into active device with modulation function and passive device with static characteristic.Optical waveguide beam splitter is one of the important passive devices in optical communication networks.It is widely used in optical communication systems to realize efficient and fast information transmission.Silicon-based materials have become the main sub-strate materials for photonic integrated circuits due to their superior photoelectric properties and compatibility with semiconductor processes in integrated circuits.In this study,the current research status of silicon optical waveguide beam splitters is analyzed,the directional coupler,multimode interference coupler and subwavelength grating are summarized,and the dimensions and performance of different types of silicon optical waveguide beam splitters are dis-cussed and compared.It provides a new idea for developing low loss,small size and wide band optical waveguide beam splitte.关键词
光波导型器件/集成光路/无源器件/光波导分束器/硅基材料/定向耦合器/多模干涉耦合器/亚波长光栅Key words
optical waveguide devices/photonic integrated circuit/passive device/optical waveguide beam splitter/silicon-based materials/directional coupler/multimode interference coupler/subwavelength grating分类
信息技术与安全科学引用本文复制引用
陈梦林,冯松,王迪,刘勇,胡祥建,冯露露..硅基光波导分束器的研究进展[J].电子科技,2025,38(1):59-72,14.基金项目
国家重点研发计划(2018YFB2200500) （2018YFB2200500）
国家自然科学基金(61204080) （61204080）
国家重点实验室基金(SKL201804) （SKL201804）
陕西省重点 研 发 计 划(2022GY-012) （2022GY-012）
西安市科技计划(2020KJRC0026)National Key R&D Program of China(2018YFB2200500) （2020KJRC0026）
National Natural Science Foundation(61204080) （61204080）
National Key Laboratory Fund(SKL201804) （SKL201804）
Shaanxi Provincial Key R&D Program(2022GY-012) （2022GY-012）
Xi'an Science and Technology Plan(2020KJRC0026) （2020KJRC0026）
