红外与毫米波学报2024，Vol.43Issue(6)：P.813-819,7.DOI:10.11972/j.issn.1001-9014.2024.06.012
Study on multi-wavelength thin film thickness determination method
SHI Ce 1XIE Mao-Bin 2ZHENG Wei-Bo 3JI Ruo-Nan 2WANG Shao-Wei 2LU Wei4
作者信息
- 1. School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China Shanghai Key Laboratory of Optical Coatings and Spectral Modulation,Shanghai 200083,China
- 2. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China Shanghai Key Laboratory of Optical Coatings and Spectral Modulation,Shanghai 200083,China
- 3. Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
- 4. School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China
- 折叠
摘要
关键词
film thickness determination/transmittance and reflectance spectra/fitting/spectral reconstruction分类
数理科学引用本文复制引用
SHI Ce,XIE Mao-Bin,ZHENG Wei-Bo,JI Ruo-Nan,WANG Shao-Wei,LU Wei..Study on multi-wavelength thin film thickness determination method[J].红外与毫米波学报,2024,43(6):P.813-819,7.基金项目
Supported by National Key R&D Program of China(2021YFA0715500) （2021YFA0715500）
National Natural Science Foundation of China(NSFC)(12227901) （NSFC）
Strategic Priority Research Program(B)of the Chinese Academy of Sciences(XDB0580000) （B）
Shanghai Municipal Science and Technology Major Project(2019SHZDZX01) （2019SHZDZX01）
Chinese Academy of Sciences President''s International Fellowship Initiative(2021PT0007). （2021PT0007）
