红外与毫米波学报2024，Vol.43Issue(6)：P.749-754,6.DOI:10.11972/j.issn.1001-9014.2024.06.004
Ion implantation process and lattice damage mechanism of boron doped crystalline germanium
HABIBA Um E 1CHEN Tian-Ye 2LIU Chi-Xian 2DOU Wei 2LIU Xiao-Yan 3LING Jing-Wei 4PAN Chang-Yi 3WANG Peng 1DENG Hui-Yong 5SHEN Hong 1DAI Ning6
作者信息
- 1. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China University of Chinese Academy of Sciences,Beijing 100049,China
- 2. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China
- 3. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China College of Physics and Optoelectronic Engineering,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China
- 4. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
- 5. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China University of Chinese Academy of Sciences,Beijing 100049,China Zhejiang Laboratory,Hangzhou 311100,China
- 6. State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China University of Chinese Academy of Sciences,Beijing 100049,China College of Physics and Optoelectronic Engineering,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China Zhejiang Laboratory,Hangzhou 311100,China
- 折叠
摘要
关键词
boron doped germanium/ion implantation/lattice damage分类
信息技术与安全科学引用本文复制引用
HABIBA Um E,CHEN Tian-Ye,LIU Chi-Xian,DOU Wei,LIU Xiao-Yan,LING Jing-Wei,PAN Chang-Yi,WANG Peng,DENG Hui-Yong,SHEN Hong,DAI Ning..Ion implantation process and lattice damage mechanism of boron doped crystalline germanium[J].红外与毫米波学报,2024,43(6):P.749-754,6.基金项目
Supported by National Key R&D Program of China(2023YFA1608701) （2023YFA1608701）
National Natural Science Foundation of China(62274168,11933006,U2141240) （62274168,11933006,U2141240）
Hangzhou Leading Innovation and Entrepreneurship Team(TD2020002)。 （TD2020002）
