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Fiber Optic Vacuum Ultraviolet Sensor Based on an AlN-Microwire Probe

Ying WANG Jiahui YE Dingbang MA Peiyao WANG Baikui LI Zhenhua SUN Honglei WU Changrui LIA Yiping WANG

光子传感器（英文版）2025，Vol.15Issue(1)：1-10,10.

光子传感器（英文版）2025，Vol.15Issue(1)：1-10,10.DOI:10.1007/s13320-024-0728-y

Fiber Optic Vacuum Ultraviolet Sensor Based on an AlN-Microwire Probe

Ying WANG ¹Jiahui YE ¹Dingbang MA ¹Peiyao WANG ²Baikui LI ²Zhenhua SUN ²Honglei WU ²Changrui LIA ¹Yiping WANG¹

作者信息

1. Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,China
2. Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University Shenzhen 518060,China
折叠

摘要

关键词

Optical fiber sensor/VUV/Fabry-Pérot interferometer/UV sensing

Key words

Optical fiber sensor/VUV/Fabry-Pérot interferometer/UV sensing

引用本文复制引用

Ying WANG,Jiahui YE,Dingbang MA,Peiyao WANG,Baikui LI,Zhenhua SUN,Honglei WU,Changrui LIA,Yiping WANG..Fiber Optic Vacuum Ultraviolet Sensor Based on an AlN-Microwire Probe[J].光子传感器（英文版）,2025,15(1):1-10,10.

基金项目

This work was supported by the National Key Research and Development Program of China(Grant Nos.2022YFE0111400 and 2022YFB3605303),Science and Technology Innovation Commission of Shenzhen(Grant Nos.JCYJ20200109114001806,JCYJ20220818095615034,and JC YJ20210324095400002),Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing(Grant No.ZDSYS20220606100405013),and Natural Science Foundation of Guangdong Province(Grant No.2023A1515012893). （Grant Nos.2022YFE0111400 and 2022YFB3605303）

光子传感器（英文版）

ISSN：1674-9251

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