强激光与粒子束2025，Vol.37Issue(2)：37-45,9.DOI:10.11884/HPLPB202537.240216
极紫外多层膜氮化物和氧化物保护层的工艺研究
Protective layer of oxides and nitrides on the surface of extreme ultraviolet multilayers
摘要
Abstract
In the process of high energy and high power extreme ultraviolet(EUV)irradiation,carbon deposition and surface oxidation are easy to form on the surface of the EUV mirror,which will affect its reflectivity and shorten its service life.To solve this problem,technology of nitride and oxide capping coating on the surface of extreme ultraviolet multilayer film was studied experimentally and characterized.In the preparation process,based on DC reactive magnetron sputtering coating technology,the"hyperbola"relationship between process gas flow and sputtering voltage was studied,to optimize the control of the amount of reactive gas,and then reduce the influence of reactive gas on Mo/Si multilayer films during reactive sputtering.Based on this method,TiN,ZrN and TiO2 capping layer were plated on the surface of Mo/Si multilayer films and were characterized by grazing incident X-ray reflection(GIXR),X-ray photoelectron spectroscopy(XPS)and transmission electron microscopy(TEM).It is proved that the nitride capping layer has certain performance advantages.关键词
极紫外多层膜/反应磁控溅射/表面保护层/氮化物/氧化物薄膜Key words
extreme ultraviolet multilayers/reactive magnetron sputtering/surface capping layer/nitride/oxide thin film分类
物理学引用本文复制引用
王佳兴,韩伟明,张晗,匡尚奇..极紫外多层膜氮化物和氧化物保护层的工艺研究[J].强激光与粒子束,2025,37(2):37-45,9.基金项目
国家自然基金委区域联合基金重点项目(U22A2070) （U22A2070）
