强激光与粒子束2025，Vol.37Issue(2)：130-135,6.DOI:10.11884/HPLPB202537.240248
小型化全固态方波Marx发生器的研究
Study of a miniaturized solid-state Marx generator
摘要
Abstract
Many applications including plasma excitation and high-power microwave sources require miniaturized high-voltage pulse generators.A miniaturized Marx generator with a novel magnetic isolated drive circuit is proposed.Making the source terminals of the charging MOSFET and discharging MOSFET in adjacent stages shorted in Marx generators based on half-bridge circuits,we apply a bipolar signal to both gates of these two MOSFETs and control both their switching.Combined with magnetic isolated driver with primary windings in series,only one bipolar signal from the primary side can synchronously drive all switches in the Marx generator,which considerably reduces the number of required components in the drive circuits.A 14-level experimental prototype was built,with a total weight of only 314 g,a width of 15 cm,a length of 8 cm,and a height of 5 cm.High-voltage square wave pulses with a peak voltage of 10 kV,a repetition frequency of 10 kHz,and a pulse width ranging from 200 ns to 5 μs were obtained over a resistive load.The 500 ns,10 kV,and 1 kHz square wave pulses generated by the prototype were used to drive the dielectric barrier discharge load,and a uniform and strong discharge was generated,indicating that the miniaturized Marx generator is suitable for driving the dielectric barrier discharge load and being used as a low-temperature plasma source.关键词
脉冲发生器/Marx发生器/小型化/方波脉冲/低温等离子体Key words
pulse generator/Marx generator/miniaturization/square-wave pulse/low-temperature plasma分类
信息技术与安全科学引用本文复制引用
李孜,马睿一,饶俊峰,姜松..小型化全固态方波Marx发生器的研究[J].强激光与粒子束,2025,37(2):130-135,6.基金项目
国家自然科学基金项目(12205192) （12205192）
姑苏青年领军人才项目(ZXL2023210) （ZXL2023210）
