电测与仪表2025，Vol.62Issue(2)：51-61,11.DOI:10.19753/j.issn1001-1390.2025.02.007
光栅直线位移测量技术研究进展与展望
Research progress and prospects of grating linear displacement measurement technology
摘要
Abstract
Linear displacement measurement technology plays an essential role in the precision manufacturing sec-tor,ensuring the accuracy of machining processes.Compared with other linear displacement measurement technolo-gies,grating-based linear displacement measurement techniques offer high measurement precision,strong resistance to interference,and the ease of implementing large-scale measurements,making it a current research focus.To ad-vance the study of grating linear displacement measurement technology,this paper initially analyzes the measure-ment principles of three types of grating linear displacement measurement systems.It reviews the research progress in these three areas and summarizes the strengths and limitations of existing studies:the grating linear displacement measurement technology based on Moire fringes is constrained by the diffraction limit,which hinders further im-provements in resolution;the technology based on diffraction gratings struggles with absolute position measurement;and the technology based on image processing algorithms suffers from low integration and limited measurement range.This paper prospects the future development directions for grating linear displacement measurement technolo-gy,providing a foundation for further research in this field.关键词
光栅直线位移测量/高精度/高分辨力/大量程/研究进展/展望Key words
grating linear displacement measurement/high precision/high resolution/large range/research pro-gress/prospect分类
信息技术与安全科学引用本文复制引用
赵志财,于海,万秋华,赵长海,李勇杰..光栅直线位移测量技术研究进展与展望[J].电测与仪表,2025,62(2):51-61,11.基金项目
国家自然科学基金资助项目(52075520) （52075520）
吉林省自然科学基金项目(20230101111JC) （20230101111JC）
