航空兵器2024，Vol.31Issue(6)：36-43,8.DOI:10.12132/ISSN.1673-5048.2024.0164
硅基异质结中波红外光电探测器的研究进展
Research Progress of Silicon-Based Heterojunction Mid-Wave Infrared Photodetectors
摘要
Abstract
Mid-wave infrared photodetector is an important photoelectric detection equipment,which uses the pho-toelectric effect to convert infrared radiation into electrical signals.It is widely used in guidance,unmanned aerial vehi-cles,fighter jets and other platforms,and plays an important role in target detection,tracking and identification.Sili-con-based heterojunction mid-wave infrared photodetectors are based on silicon materials,combined with mature silicon device technology and infrared detection performance,and have the advantages of low cost,easy preparation and high integration,becoming an opportunity to break through the bottleneck of traditional silicon-based optoelectronic devices.With the continuous progress of research,silicon-based heterojunction mid-wave infrared photodetectors have made great progress in various aspects,bringing new opportunities and challenges to infrared photoelectric detection technolo-gy.In this paper,the research and development of new germanium/silicon,graphene/silicon and other silicon-based heterojunction mid-wave infrared photodetectors are discussed,and the advantages of detectors of different materials are analyzed and compared.关键词
半导体器件/光电器件/探测器/中波红外/硅基异质结Key words
semiconductor devices/optoelectronic devices/detector/mid-wave infrared/silicon-based hetero-junction分类
军事科技引用本文复制引用
曾雨玲,冯松,马保科,何心怡,吴鉴洋,李浩杰..硅基异质结中波红外光电探测器的研究进展[J].航空兵器,2024,31(6):36-43,8.基金项目
国家重点研发计划项目(2018YFB2200500) （2018YFB2200500）
国家自然科学基金项目(61204080) （61204080）
国家重点实验室基金项目(SKL201804) （SKL201804）
陕西省重点研发计划项目(2022GY-012) （2022GY-012）
