空间电子技术2025，Vol.22Issue(1)：67-73,7.DOI:10.3969/j.issn.1674-7135.2025.01.007
面向太赫兹成像应用的硅基片上贴片天线阵列
Silicon-based on-chip patch antenna array for terahertz imaging applications
摘要
Abstract
With the development of terahertz technology,higher requirements have been placed on the resolution,integration,and power consumption of on-chip imaging systems.On-chip antenna technology was a crucial approach to realize the integration of antennas and circuits,it offered advantages such as compact structure and high reliability.However,on-chip antennas faced challenges such as narrow bandwidth and low gain.Meanwhile,for terahertz imaging chips,the configuration of antenna arrays was equally important as the performance of antenna elements,it necessitated the achievement of high gain,low coupling,and side-lobe suppression.This paper designed on-chip patch antenna elements and arrays for terahertz imaging applications based on complementary metal oxide semiconductor technology.By loading slots,we achieved antenna elements with a 11.8%fractional bandwidth,the gain of antenna arrays reached 10.6 dBi with the efficiency of 21.9%,it satisfied the demands of terahertz imaging applications.We integrated terahertz antenna arrays with circuits,a compact terahertz imaging array chip has been realized,whose radiation performance of the transceiver arrays meets the requirements for terahertz imaging applications.关键词
太赫兹/硅基/片上天线/成像Key words
terahertz/silicon-based/antenna on-chip/imaging分类
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黄建程,马凯学..面向太赫兹成像应用的硅基片上贴片天线阵列[J].空间电子技术,2025,22(1):67-73,7.基金项目
国家重点研发计划项目(编号:2018YFB2202500) （编号:2018YFB2202500）
