工程设计学报2025，Vol.32Issue(1)：82-91,10.DOI:10.3785/j.issn.1006-754X.2025.04.108
音圈电机驱动的三自由度大行程柔性偏摆台设计与分析
Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor
摘要
Abstract
In order to solve the problem that the traditional piezoelectric-driven tip-tilt stage cannot adapt to many millimeter-level large-stroke application scenarios due to its small stroke,a three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor is designed,and its compliance modeling and performance testing are carried out.Firstly,the structural configuration of the three-degree-of-freedom large-stroke flexible tip-tilt stage was introduced,which included three sets of 120° uniformly arranged vertical driving chains,and the motion decoupling of each driving chain and the linear guidance of the motor rotor were achieved by using flexible spherical hinges and parallelogram mechanisms.At the same time,the kinematics equation of the dynamic platform of the tip-tilt stage was established according to the geometric relationship of each driving chain.Then,the compliance matrix method was used to derive the compliance analytical models for the flexible spherical hinge,the driving chain and the overall tip-tilt stage.Subsequently,the accuracy of the derived compliance analytical model was verified through the statics finite element simulation analysis for the tip-tilt stage.Finally,a tip-tilt stage testing system was built to measure its maximum stroke,as well as the translational compliance along the Z-axis and the rotational compliance around the X and Y axes,so as to verify the effectiveness and rationality of the structural design of the tip-tilt stage and the derived compliance analytical model.The results showed that the relative error between the calculation results of the compliance analytical model and the finite element simulation results,as well as the experimental results,was within 10%.The maximum stroke range of the tip-tilt stage was±0.054 3 rad×±0.047 2 rad×±4.45 mm,which had the advantages of large-stroke and compact structure.The designed tip-tilt stage can be used in various situations that require large-stroke spatial positioning,demonstrating broad application prospects.关键词
偏摆台/大行程/柔度/音圈电机/柔性球铰/有限元仿真Key words
tip-tilt stage/large-stroke/compliance/voice coil motor/flexible spherical hinge/finite element simulation分类
机械工程引用本文复制引用
徐智皓,陆晓伟,谢雨欣,赖磊捷..音圈电机驱动的三自由度大行程柔性偏摆台设计与分析[J].工程设计学报,2025,32(1):82-91,10.基金项目
国家自然科学基金资助项目(52475063) （52475063）
国家自然科学基金重点项目(U2013211) （U2013211）
国家自然科学基金青年科学基金资助项目(51605275) （51605275）
上海市自然科学基金资助项目(21ZR1426000) （21ZR1426000）
