测试技术学报2025，Vol.39Issue(2)：138-147,10.DOI:10.62756/csjs.1671-7449.2025019
基于悬浮式H型石墨烯的纳机电加速度计设计
Design of Nano-Electromechanical Accelerometers Based on Suspended H-Shape Graphene
摘要
Abstract
Graphene,an ultrathin material,features excellent electrical and mechanical properties,making it an ideal candidate for membrane materials in the field of nano-electromechanical systems.It shows great potential for sensing applications.The size of current nano-electromechanical sensors is extremely small,and the primary challenge lies in enhancing device sensitivity.In this work,a novel suspended H-shaped graphene resonator for acceleration is first proposed,and the properties of the H-shape graphene are explored.The effect of the size of H-shape graphene and its mass on frequency and displacement is simu-lated,and the final dimensions of the graphene resonator are designed.The correlation between device sensitivity enhancement and stress distribution is explored by analyzing the sensing dynamics at the beam-mass interface.Eventually,the displacement sensitivity of the sensor can reach 47.30 nm/nN.Compared with conventional suspended graphene accelerometers,the sensitivity is improved by 3.76 times,and the Q-factor is enhanced by 2.46 times without increasing the size of the proof mass.These findings lay the foundation for the design and manufacture of low-cost,high-sensitivity,miniaturized nano-electromechanical systems,such as accelerometers,gyroscopes,and displacement sensors.关键词
悬浮石墨烯/力学特性/有限元法/高灵敏加速度计/纳机电系统Key words
suspended graphene/mechanical properties/finite element method/high-sensitivity acceler-ometer/nano-electromechanical systems分类
机械工程引用本文复制引用
谷妍霞,刘文耀,李伟,杨泽宇,田昊源,唐军,刘俊..基于悬浮式H型石墨烯的纳机电加速度计设计[J].测试技术学报,2025,39(2):138-147,10.基金项目
国家重点研发计划资助项目(2022YFB3203400) （2022YFB3203400）
国家自然科学基金资助项目(U21A20141,62273314,51821003) （U21A20141,62273314,51821003）
