测试技术学报2025，Vol.39Issue(2)：211-217,7.DOI:10.62756/csjs.1671-7449.2025016
基于4H-SiC的差分电容真空计设计及仿真
Design and Simulation of Differential Capacitance Vacuum Gauge Based on 4H-SiC
摘要
Abstract
In order to meet the requirements of vacuum testing under complex conditions such as high tem-perature and corrosion,a miniaturized differential capacitive vacuum gauge based on 4H-SiC as sensitive material is presented in this paper.The influence of mechanical sensitive structure and capacitance struc-ture on the sensitivity and nonlinearity of the sensor is studied by finite element simulation.The sensor-sensitive unit is composed of a circular sensitive film and an"open mouth"double capacitance structure.The simulation results show that compared with the single capacitance structure,the sensitivity of the dif-ferential capacitance sensitive structure decreases by only 0.02 fF/Pa and the nonlinearity decreases from 0.92%to 0.37%in the range of 0～1 000 Pa.This study provides feasible technical support for vacuum pressure testing in a complex environment.关键词
薄膜真空计/4H-SiC/差分电容/有限元分析Key words
diaphragm vacuum meter/4H-SiC/differential capacitance/finite element analysis分类
信息技术与安全科学引用本文复制引用
李鑫浦,张姝,雷程,张臻昊,李志强,余建刚,梁庭..基于4H-SiC的差分电容真空计设计及仿真[J].测试技术学报,2025,39(2):211-217,7.基金项目
国家重点研发计划资助项目(2023YFB3208500) （2023YFB3208500）
山西省重点研发计划资助项目(2023020302010) （2023020302010）
中央引导地方科技发展资助项目(YDZJSX20231B006) （YDZJSX20231B006）
