计算机与数字工程2025，Vol.53Issue(1)：71-76,6.DOI:10.3969/j.issn.1672-9722.2025.01.015
线性可控电热式MEMS微镜设计与仿真分析
Design and Simulation Analysis of Linear Controllable Electrothermal MEMS Micromirrors
张博伦 1李庆党 2祝方舟3
作者信息
- 1. 青岛科技大学机电工程学院 青岛 266100
- 2. 青岛科技大学机电工程学院 青岛 266100||青岛科技大学中德科技学院 青岛 266100
- 3. 青岛科技大学中德科技学院 青岛 266100
- 折叠
摘要
Abstract
Based on the electrothermal deflection structure in the field of MEMS micro mirror,this paper proposes a new struc-tural design of cantilever MEMS micro mirror,and compares the electrothermal material selection of this structure.Under the same voltage,different heating materials will have different structural deformation.At the same time,the size of MEMS micro mirror canti-lever structure is simulated and optimized.Finally,the MEMS micro mirror can change with the applied voltage.The deflection an-gle of the micro mirror is linearly controllable.关键词
微机电系统/线性可控/电热式微镜/多层结构Key words
micro-electromechanical system/linear controllable/electromechanical system/multi-layer structure分类
信息技术与安全科学引用本文复制引用
张博伦,李庆党,祝方舟..线性可控电热式MEMS微镜设计与仿真分析[J].计算机与数字工程,2025,53(1):71-76,6.
