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基于仿生平面复眼透镜提高AlGaN基DUV Micro-LED光提取效率

刘欢 杨涛 王铠尧 刘宁炀 周文 谭起龙

机电工程技术2025,Vol.54Issue(3):47-51,5.
机电工程技术2025,Vol.54Issue(3):47-51,5.DOI:10.3969/j.issn.1009-9492.2025.03.009

基于仿生平面复眼透镜提高AlGaN基DUV Micro-LED光提取效率

Improving the Light Extraction Efficiency of AlGaN-based DUV Micro LED Utilizing Planar Compound Eye Lens

刘欢 1杨涛 1王铠尧 2刘宁炀 1周文 3谭起龙4

作者信息

  • 1. 五邑大学电子与信息工程学院,广东 江门 529000||广东省科学院半导体研究所,广州 510075
  • 2. 五邑大学电子与信息工程学院,广东 江门 529000
  • 3. 西安交通大学材料科学与工程学院,西安 710049
  • 4. 广东省科学院半导体研究所,广州 510075
  • 折叠

摘要

Abstract

Internal total reflection is one of the important factors limiting the light extraction efficiency of AlGaN-based deep ultraviolet micro light-emitting diodes(DUV Micro-LEDs),which seriously reduces the energy utilization and lifespan of deep ultraviolet LEDs.Taking inspiration from the high energy utilization of insect compound eye structures,a method based on biomimetic planar compound eye lenses is proposed to improve the light extraction efficiency of AlGaN-based Micro LEDs.By extracting and reconstructing the phase of the compound eye structure of the Tenodera sinensis,the use of biomimetic planar compound eyes can effectively suppress the internal total reflection of the dielectric surface,thereby achieving a significant improvement in the efficiency of deep ultraviolet LED light extraction.The finite difference time domain(FDTD)simulation shows that by etching a biomimetic planar compound eye lens on the Micro LED surface,the light extraction efficiency of TE and TM modes is improved by 84.5%and 242%,respectively.Thanks to the compatibility of the ultra-thin planar structure and process of the biomimetic metasurface planar compound eye lens,it is expected to improve the performance of deep ultraviolet light-emitting diodes through a single nanoimprinting.In addition,functional reconstruction methods utilizing biomimetic features have potential applications in large fields of view,structural lighting,and biomimetic structures.

关键词

深紫外微型发光二极管/光提取效率/平面复眼透镜

Key words

DUV Micro-LED/light emitting extraction/planar compound eye lens

引用本文复制引用

刘欢,杨涛,王铠尧,刘宁炀,周文,谭起龙..基于仿生平面复眼透镜提高AlGaN基DUV Micro-LED光提取效率[J].机电工程技术,2025,54(3):47-51,5.

基金项目

国家重点研发计划课题(2023YFB3609703) (2023YFB3609703)

广东省自然科学基金(2023A1515011175) (2023A1515011175)

广州市基础与应用基础研究专题(2024A04J00263) (2024A04J00263)

广东省科学院科技计划项目(2022GDASZH-2022010111,2023GDASZH-2023030601-02) (2022GDASZH-2022010111,2023GDASZH-2023030601-02)

机电工程技术

1009-9492

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