高温环境下石墨舟卡点装配性能的数值模拟分析OA

In order to prevent relative movement or loosening of graphite boat plates in high-temperature environments,the graphite boat stuck points are usually assembled using interference fit to increase the rigidity of the connection and the stability of the support.Designing a reasonable interference fit is crucial for the stability of the silicon wafer and the service performance of the graphite boat stuck points.This paper simulates the pressing process of graphite boat stuck points through finite element simulation method,and numerically analyzes the assembly performance of graphite boat stuck points under normal and high temperature environments.It proposes an interference fit tolerance selection scheme for graphite boat stuck points that is suitable for different high temperature environments.The research results show that:1)At room temperature,both the pressing force and the contact stress of the graphite boat stuck point increase with the increase of the interference fit tolerance of the graphite boat stuck point.When the interference fit tolerance of graphite boat stuck points increases from 0 μm to 20 μm,the maximum contact stress of graphite boat stuck points increases from 0.22 MPa to 18.03 MPa,the maximum pressing force increases from 1.1 N to 84.9 N.2)Under high temperature conditions,with the same interference fit tolerance of graphite boat sticking points,as the body cavity temperature of tubular PECVD equipment increases,the maximum contact stress of graphite boat sticking points gradually increases.3)When the body cavity temperature is 530℃and the interference fit tolerance of the graphite boat stuck point is 15 μm,the maximum contact stress of the graphite boat stuck point is located on the side of the graphite boat sheet,indicating that failure and damage are more likely to occur here.The minimum contact stress of the graphite boat stuck point is located near the middle of the graphite boat sheet.Therefore,when determining the interference fit tolerance of graphite boat stuck points in high temperature environments,it is recommended to prioritize analyzing the distribution of contact stress at the graphite boat stuck point on the side of the graphite boat plate.4)It is recommended that the body cavity temperature of the tubular PECVD equipment should not exceed 530℃,and the interference fit tolerance of the graphite boat should be controlled between 5～15 μm as much as possible.If it is necessary to raise the body cavity temperature to above 530℃,it is recommended to control the interference fit tolerance of the graphite boat stuck point within 5～10 μm.If only considering the coating efficiency of the equipment and not taking into account the working hours of graphite materials,the interference fit tolerance can be relaxed to 5～15 μm.