铜业工程Issue(1)：9-15,7.DOI:10.3969/j.issn.1009-3842.2025.01.002
细晶粒高纯铌管靶材的研制
Development of Fine Grain High Purity Niobium Tube Target
摘要
Abstract
This paper studied a new process for preparing high-purity fine-grained niobium tube target materials,in order to obtain nio-bium tube target materials with small and uniform structure.Firstly,high-purity niobium ingot of Φ 300 mm diameter was forged and vacuum annealed,and then,it is processed into extruded ingot through turning and drilling,The hole in the ingot was enlarged on the hot perforating machine from Φ 65 mm to Φ 93 mm,extruding into niobium tube target on the extruding machine after heating.High-purity niobium tube target products were obtained after vacuum annealing and mechanical processing.The metallographic test results show that the niobium tube target product has fine and uniform grain size,the average grain size is 38 µm in the horizontal direction,and 32 µm in the vertical direction.The electron back scatter diffraction(EBSD),test results show that the texture of the extruded niobi-um tube target product is mainly composed of<001>,the texture of the recrystallized niobium tube target product is mainly a mixed tex-ture composed of two components:<110>and<111>.关键词
铌管靶/细晶/穿孔/挤压/织构Key words
niobium tube target/fine grain size/perforating/extruding/texture分类
金属材料引用本文复制引用
吴孟海,余涛,聂腾飞,张浩,朱芳,张国祥..细晶粒高纯铌管靶材的研制[J].铜业工程,2025,(1):9-15,7.基金项目
国家自然科学基金项目(52363031)资助 （52363031）
