信息与控制2024，Vol.53Issue(6)：804-816,13.DOI:10.13976/j.cnki.xk.2024.3457
晶圆驻留时间约束下双组合设备协同调度
Cooperative Scheduling of Twin-cluster Tools with Wafer Residence Time Constraints
摘要
Abstract
In semiconductor wafer fabrication,adhering to residency time constraints is crucial to prevent damage to the wafers.Moreover,the use of twin-cluster tools adds complexity to the scheduling process owing to the need for resource coordination between two units.We investigate a steady-state cycle scheduling challenge of twin-cluster tools equipped with a complete concurrent process-ing module,particularly for wafer residence time constraints.Initially,a resource-oriented Petri net model is developed to elucidate the operation of twin-cluster tools under steady-state conditions by integrating wafer residency time constraints with a complete concurrent processing module.Af-terward,a control strategy is introduced to prevent system deadlock.Subsequently,the conditions without robot task interference are determined by analyzing the workload of the processing module and robot tasks.In scenarios with robot task interference,schedulable conditions for the twin-clus-ter tool system are derived,and two algorithms are developed to calculate the steady state cycle time of the system and the robot schedule.Finally,these findings confirm the feasibility and effec-tiveness of the algorithms.关键词
晶圆制造/双组合设备/全并行加工/Petri网/时间约束Key words
wafer fabrication/twin-cluster tool/complete concurrent processing/Petri net/time constraint分类
信息技术与安全科学引用本文复制引用
潘春荣,周浩,熊文清,崔煜,罗继亮..晶圆驻留时间约束下双组合设备协同调度[J].信息与控制,2024,53(6):804-816,13.基金项目
国家自然科学基金项目(72161019) （72161019）
江西省自然科学基金项目(20232BAB212028) （20232BAB212028）
江西省引进培养创新创业高层次人才"千人计划"项目(jxsq2020102091) （jxsq2020102091）
