中国光学（中英文）2025，Vol.18Issue(1)：170-185,16.DOI:10.37188/CO.EN-2024-0012
压电定位系统建模及滑模逆补偿控制
Modeling and sliding mode control based on inverse compensation of piezo-positioning system
摘要
Abstract
In order to enhance the control performance of piezo-positioning system,the influence of hyster-esis characteristics and its compensation method are studied.Hammerstein model is used to represent the dy-namic hysteresis nonlinear characteristics of piezo-positioning actuator.The static nonlinear part and dynam-ic linear part of the Hammerstein model are represented by models obtained through the Prandtl-Ishlinskii(P-I)model and Hankel matrix system identification method,respectively.This model demonstrates good gener-alization capability for typical input frequencies below 200 Hz.A sliding mode inverse compensation track-ing control strategy based on P-I inverse model and integral augmentation is proposed.Experimental results show that compared with PID inverse compensation control and sliding mode control without inverse com-pensation,the sliding mode inverse compensation control has a more ideal step response and no overshoot,moreover,the settling time is only 6.2 ms.In the frequency domain,the system closed-loop tracking band-width reaches 119.9 Hz,and the disturbance rejection bandwidth reaches 86.2 Hz.The proposed control strategy can effectively compensate the hysteresis nonlinearity,and improve the tracking accuracy and anti-disturbance capability of piezo-positioning system.关键词
压电定位系统/迟滞非线性/Hammerstein模型/P-I模型/系统辨识/滑模控制Key words
piezo-positioning system/hysteresis nonlinearity/Hammerstein model/Prandtl-Ishlinskii(P-I)model/system identification/sliding mode control分类
物理学引用本文复制引用
李智斌,辛源泽,张建强,孙崇尚..压电定位系统建模及滑模逆补偿控制[J].中国光学（中英文）,2025,18(1):170-185,16.基金项目
国家自然科学基金(No.U23A20336,No.52227811,No.61933006) （No.U23A20336,No.52227811,No.61933006）
山东省自然科学基金(No.ZR2021QF117,No.ZR2021QF140)Supported by National Natural Science Foundation of China(No.U23A20336,No.52227811,No.61933006) （No.ZR2021QF117,No.ZR2021QF140）
Natural Science Foundation of Shandong Province(No.ZR2021QF117,No.ZR2021QF140) （No.ZR2021QF117,No.ZR2021QF140）
