中国光学（中英文）2025，Vol.18Issue(1)：53-62,10.DOI:10.37188/CO.2024-0083
高衍射效率偏振无关合束光栅的双层梯形槽形设计与分析
Design and analysis of a double-layer trapezoidal groove of polarization-independent beam-combining gratings with high diffraction efficiency
摘要
Abstract
In order to meet the needs of broad band,high diffraction efficiency,and polarization independ-ence,a double-layer trapezoidal polarization-independent beam grating is proposed in this paper.Firstly,based on the strict coupled wave theory,a design model of polarization-independent combined beam grating based on a particle swarm optimization algorithm is established,and the efficiency characteristics are optim-ized by randomly generating characteristic wavelengths.Then,the effects of slot depth,width ratio,side angle,and other structural parameters on the diffraction efficiency and bandwidth of single-layer and double-layer trapezoidal grating are analyzed in detail.Finally,the electric field enhancement characteristics of the two structures are analyzed and discussed.The results show that the polarization independent beam combin-ing grating with double-layer trapezoidal groove achieves a theoretical diffraction efficiency of more than 99％in the bandwidth range of 51 nm(1 038 nm-1 089 nm),and has a larger process tolerance than the tradi-tional single-layer trapezoidal structure,which meets the bandwidth of 30 nm and the high diffraction effi-ciency of 98％in the tolerance range,and has lower near-field grating enhancement.It has a stronger resist-ance to laser damage.The proposed double-layer trapezoidal grating with wide band and high diffraction effi-ciency can improve the output power of laser systems,and has significant application value in the field of laser beam combination.关键词
衍射光栅/偏振无关/工艺容差/电场Key words
diffraction grating/polarization independent/process tolerance/electric field分类
信息技术与安全科学引用本文复制引用
孙澳,王瑞鹏,孙雨琦,王新宇,李文昊,姜岩秀..高衍射效率偏振无关合束光栅的双层梯形槽形设计与分析[J].中国光学（中英文）,2025,18(1):53-62,10.基金项目
国家重点研发计划(No.2023YFF0715802) （No.2023YFF0715802）
国家自然科学基金青年基金(No.12105288,No.U21A20509) （No.12105288,No.U21A20509）
中国科学院青年创新促进会项目(No.2022218) （No.2022218）
吉林省自然科学基金项目(No.20210101139JC)Supported by National Key R & D Program of China(No.2023YFF0715802) （No.20210101139JC）
National Natural Science Foundation of China(No.12105288,No.U21A20509) （No.12105288,No.U21A20509）
Youth Innovation Promotion Association of the Chinese Academy of Sciences(No.2022218) （No.2022218）
Natural Science Foundation of Jilin Province(No.20210101139JC) （No.20210101139JC）
