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Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage

Yuan Ma Sen Wang Zhong-Shuai Wu

Nano-Micro Letters2025，Vol.17Issue(5)：P.117-144,28.

Nano-Micro Letters2025，Vol.17Issue(5)：P.117-144,28.DOI:10.1007/s40820-024-01625-9

Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage

Yuan Ma ¹Sen Wang ²Zhong-Shuai Wu³

作者信息

1. State Key Laboratory of Catalysis,Dalian Institute of Chemical Physics,Chinese Academy of Sciences,Dalian 116023,People’s Republic of China University of Chinese Academy of Sciences,Beijing 100049,People’s Republic of China
2. State Key Laboratory of Catalysis,Dalian Institute of Chemical Physics,Chinese Academy of Sciences,Dalian 116023,People’s Republic of China School of Transportation Engineering,Dalian Jiaotong University,Dalian 116028,People’s Republic of China
3. State Key Laboratory of Catalysis,Dalian Institute of Chemical Physics,Chinese Academy of Sciences,Dalian 116023,People’s Republic of China Dalian National Laboratory for Clean Energy,Chinese Academy of Sciences,Dalian 116023,People’s Republic of China
折叠

摘要

关键词

Microbatteries/Photolithography/Internet of Things/Micropatterns/On-chip energy storage

分类

信息技术与安全科学

引用本文复制引用

Yuan Ma,Sen Wang,Zhong-Shuai Wu..Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage[J].Nano-Micro Letters,2025,17(5):P.117-144,28.

基金项目

supported by the National Natural Science Foundation of China(22125903,22439003,22209175) （22125903,22439003,22209175）

the National Key R&D Program of China(Grant 2022YFA1504100,2023YFB4005204) （Grant 2022YFA1504100,2023YFB4005204）

the Energy Revolution S&T Program of Yulin Innovation Institute of Clean Energy(Grant E412010508) （Grant E412010508）

the State Key Laboratory of Catalysis(No:2024SKL-A-001)。（No:2024SKL-A-001）

Nano-Micro Letters

ISSN：2311-6706

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