Journal of Changshu Institute of Technology2025，Vol.39Issue(2)：11-16,6.
磁控溅射制备Mo薄膜及其在Sb2Se3薄膜太阳电池中的应用
Fabrication of Mo Films by Magnetron Sputtering and Their Applications in Sb2Se3 Thin Film Solar Cells
彭明姗 1马靓文 1丛姗 1易庆华 1房勇 1韩志达 1钱斌 1江学范 1张磊1
作者信息
- 1. 常熟理工学院 电子信息工程学院,江苏 常熟 215500
- 折叠
摘要
Abstract
In this study,Mo films were fabricated by magnetron sputtering.The influence of deposition pressure and substrate temperature on the structural properties,reflectance and resistivity were studied by X-ray diffraction(XRD),scanning electron microscopy(SEM),UV-Vis spectrophotometer and four-probe resistivity tester.The results show that as the deposition pressure increased,the crystallization of Mo films gradually deteriorated,and the reflectance and resistivity gradually increased.As the deposition temperature increased,the Mo films fabricated at different deposition pressures showed different characterization.At low deposition pressure(0.2 Pa),the structure,reflectance and resistivity showed negligible changes when the substrate temperature increased.On the other hand,at high deposition pressure(5 Pa),the crystallization improved and the resistivity decreased as the substrate temperature increased.Finally,the Sb2Se3 solar cells deposited on the double-layer structured Mo contacts with the first layer deposited at 5 Pa,100℃ and the second layer deposited at 0.2 Pa,300℃ showed a power conversion efficiency of 5.1％.关键词
磁控溅射/Mo薄膜/Sb2Se3/太阳电池Key words
magnetron sputtering/Mo contacts/Sb2Se3/solar cells分类
通用工业技术引用本文复制引用
彭明姗,马靓文,丛姗,易庆华,房勇,韩志达,钱斌,江学范,张磊..磁控溅射制备Mo薄膜及其在Sb2Se3薄膜太阳电池中的应用[J].Journal of Changshu Institute of Technology,2025,39(2):11-16,6.
