Journal of Changshu Institute of Technology2025，Vol.39Issue(2)：26-29,4.
物理气相沉积法在泡沫钛基底上生长硒化铟纳米棒研究
A Research on the Growth of In2Se3 Nanorods on Titanium Foam Substrate by Physical Vapor Deposition
摘要
Abstract
In this research,a simple physical vapor deposition method is used to grow high-density one-dimensional indium selenide(In2Se3)nanorods on gold plated(Au)titanium foam substrate using In2Se3 powder as precursor,based on the Vapour-Liquid-Solid(Vapor-Liquid-Solid,VLS)growth mechanism of one-dimensional nanomaterials.The scanning electron microscope(Scanning Electron Microscope,SEM)is used to characterize the morphology.The result shows that compared with the common monocrystalline silicon substrate,the one-dimensional In2Se3 nanorods grown on titanium foam substrate have higher density.In addition,using titanium foam substrate can improve preparation efficiency and can be reused to greatly reduce the preparation cost.关键词
泡沫钛基底/物理气相沉积法/VLS/In2Se3纳米棒Key words
titanium foam substrate/physical vapor deposition/Vapour-Liquid-Solid/In2Se3 nanorods分类
数理科学引用本文复制引用
侯尹慧,刘曦..物理气相沉积法在泡沫钛基底上生长硒化铟纳米棒研究[J].Journal of Changshu Institute of Technology,2025,39(2):26-29,4.基金项目
安徽省高校优秀青年科研项目"铌酸盐中几种稀土离子发光特性及温度传感的研究"(2023AH030085) （2023AH030085）
