桂林电子科技大学学报Issue(5)：511-518,8.DOI:10.16725/j.1673-808X.2023111
两种不同形式原料粉体制备的ITO靶材特性的比较研究
Comparative study of the characteristics of ITO targets prepared from two different forms of raw material powders
摘要
Abstract
Indium tin oxide(ITO)thin films are widely used in display devices,solar cells,gas sensors,etc,because of their excel-lent properties.The preparation of high-quality ITO thin films by sputtering requires ITO targets with high purity,high density,uni-form organization and good electrical conductivity,and the choice of raw material powder to prepare high-quality ITO targets has been a highly controversial topic.To obtain high-quality ITO sputtering targets,this study used indium tin oxide(ITO)powder and indium oxide-tin oxide hybrid powder as raw materials to produce the corresponding ITO targets by cold sintering and microwave sintering.By analyzing the phase structure,microscopic morphology,density,conductivity and elemental distribution,the perfor-mance differences of the ITO targets prepared from the two different powders under the same cold sintering-microwave sintering conditions were compared.The results show that the ITO targets made from the indium oxide-tin oxide mixture exhibit higher densi-ties,better electrical properties and finer grains.The targets made from the two different forms of raw materials show a uniform component distribution.The above results are in favor of improving the quality of ITO targets and reducing the production cost.关键词
ITO靶材/水热ITO粉体/氧化铟/氧化锡混合粉末/冷烧结/微波烧结Key words
ITO target/hydrothermal ITO powder/indium oxide,tin oxide mixed powder/cold sintering/microwave sintering分类
通用工业技术引用本文复制引用
耿智凡,朱归胜,徐华蕊..两种不同形式原料粉体制备的ITO靶材特性的比较研究[J].桂林电子科技大学学报,2024,(5):511-518,8.基金项目
国家自然科学基金(U21A2065) （U21A2065）
广西科技重大专项(AA21077018,AB20297053) （AA21077018,AB20297053）
电子信息材料与器件工程研究中心(EIMD-AA202001) （EIMD-AA202001）
广西信息材料重点实验室基金(201002-Z) （201002-Z）
