光学精密工程2025，Vol.33Issue(1)：25-36,12.DOI:10.37188/OPE.20253301.0025
膜厚监控系统准直聚焦耦合光路的研制
Development of collimated focus coupled optical path for film thickness monitoring system
摘要
Abstract
To address the limitations of current direct optical film thickness monitoring systems,including the dispersion of halogen lamp light sources,weak detector signal amplitudes,and poor monitoring accura-cy in the short-wave band,as well as the spectral non-rectangularity-induced errors in the fabrication of nar-row-band filter films(bandwidth<5 nm),this study proposes an innovative optical system design.By an-alyzing the intensity distribution of the HLX64623 halogen lamp and the principles of optical fiber coupling for signal reception,an initial structure for a collimated focusing coupled optical system was developed based on the structural parameters of the coating machine.The design incorporates an aspheric U-type re-flector and free-form surface lenses to achieve collimation of the dispersive light source,focusing of optical signals,and efficient optical fiber coupling.Using Zemax software,the system was iteratively optimized with the irradiance and spot size on the substrate and the optical fiber receiving end as key objectives.After optimization,the irradiance intensity on the substrate increased by 147%,while the irradiance intensity at the optical fiber receiving end improved from 0 to 1.53%,compared to the independent light source config-uration.When installed on a coating machine,the collimated focusing coupled optical system demonstrat-ed a 362.3%improvement in signal intensity and a 91.9%enhancement in the signal-to-noise ratio com-pared to the independent light source.Experimental validation involved the fabrication of narrow-band fil-ter films with a central wavelength of 365 nm and a bandwidth of 10 nm.Continuous deposition across three coating cycles achieved a central wavelength shift of less than 1 nm and a full width at half maximum of 10 nm.These results confirm that the proposed system enables high-precision monitoring of narrow-band filter films across wavelengths ranging from the near-ultraviolet to the visible and near-infrared regions.关键词
光学薄膜/膜厚监控/光路设计/光纤耦合/光学膜厚Key words
optical film/film thickness monitoring/optical path design/fiber optic coupling/optical film thickness分类
物理学引用本文复制引用
谢海峰,付秀华,董所涛,石澎,任松林,杜昕,王由德..膜厚监控系统准直聚焦耦合光路的研制[J].光学精密工程,2025,33(1):25-36,12.基金项目
中山市引进创新团队项目(No.CXTD2023008) （No.CXTD2023008）
中山市社会公益科技研究项目(No.2022B2005) （No.2022B2005）
