光学精密工程2025，Vol.33Issue(1)：75-83,9.DOI:10.37188/OPE.20253301.0075
光纤准直非球面微透镜阵列模压成形
Precision glass molding for fiber collimating aspherical microlens array
摘要
Abstract
This study explores the application of precision glass molding(PGM)technology to enhance the machining accuracy and efficiency of aspherical microlens arrays(AMLA)for fiber array collimation.The research focuses on the control of mold machining accuracy and the implementation of a compensation approach to address form errors in AMLA fabrication.A localized spiral diamond milling method is intro-duced for machining nickel-phosphorus mold materials,tailored to the structural characteristics and strin-gent precision requirements of AMLA.Furthermore,a form error compensation method is developed,considering the high-temperature properties of mold and glass materials as well as process parameters af-fecting accuracy.By optimizing the mold profile through compensation design,the precision of PGM is significantly improved,achieving the high-accuracy fabrication of a 10×10 AMLA.The proposed process controls the form error peak-to-valley(PV)within 220-380 nm and achieves a surface roughness(Ra)of 7-10 nm,thereby enhancing optical performance.This work provides a viable and efficient technical frame-work for the high-precision,large-scale production of AMLA.关键词
超精密加工/螺旋金刚石铣削/非球面微透镜阵列/玻璃模压成形/面形误差Key words
ultraprecision machining/spiral diamond milling/aspherical microlens array/precision glass molding/form error分类
金属材料引用本文复制引用
高立恒,于谦,周天丰,周佳,孙秀文,闫涛,阮本帅..光纤准直非球面微透镜阵列模压成形[J].光学精密工程,2025,33(1):75-83,9.基金项目
国家自然科学基金青年项目(No.52205440) （No.52205440）
江西省重大科技研发专项"揭榜挂帅"(No.20213AAE02003) （No.20213AAE02003）
