化工学报2025，Vol.76Issue(2)：438-453,16.DOI:10.11949/0438-1157.20241138
电子级磷酸的结晶精制技术发展现状与研究进展
Current status and research progress of crystallization technology of electronic grade phosphoric acid
摘要
Abstract
As an ultra-high purity reagent commonly used in electronics industry,electronic grade phosphoric acid is widely used in wet etching and cleaning in microelectronics industry such as large-screen liquid crystal display and huge scale integration circuit.With the iterative update of the processing precision of electronic components,the requirements for impurity content and particles in electronic grade phosphoric acid are also increasing.In this paper,the common methods for the deep purification of electronic grade phosphoric acid are reviewed,the advantages and application progress of crystallization refining technology in the deep purification of electronic grade phosphoric acid are emphasized,the mechanism of impurity accumulation and migration in the process of crystallization purification is summarized,and the strengthening means of crystallization purification process is outlined.Finally,the prospect of the development of crystallization refining technology of electronic grade phosphoric acid is presented.关键词
电子级磷酸/电子材料/结晶/纯化/过程强化Key words
electronic grade phosphoric acid/electronic material/crystallization/purification/process intensification分类
化学化工引用本文复制引用
董举,余留洋,贾晟哲,史连军,王诗瀚,胡国涛,汤伟伟,王静康,龚俊波..电子级磷酸的结晶精制技术发展现状与研究进展[J].化工学报,2025,76(2):438-453,16.基金项目
中低品位磷矿及其共伴生资源高效利用国家重点实验室开放课题基金项目(2015DQ820763) （2015DQ820763）
