化工学报2025，Vol.76Issue(2)：707-717,11.DOI:10.11949/0438-1157.20240738
三氟化氮精馏分离流程的设计与控制
Design and control of nitrogen trifluoride distillation separation process
摘要
Abstract
Nitrogen trifluoride plays a critical role in the etching and cleaning processes in integrated circuit fabrication.Its product purity and purity stability are high,and the energy consumption is high.Focusing on the energy efficiency and controllability of the nitrogen trifluoride distillation process,the separation sequences,thermal integration,and dynamic control of the process were systematically studied.Based on the existing industrial direct separation sequence process,the indirect separation sequence process,the heat-integrated direct separation sequence process,and the heat-integrated indirect separation sequence process were proposed.Simulation results indicate that the heat-integrated indirect separation sequence process is optimal,reducing the total annual cost by 96.4×104 CNY compared to the direct separation sequence process with an annual capacity of 120000 kmol.A dynamic control structure study for the direct separation sequence process and the heat-integrated indirect separation sequence process was conducted.The results show that the proposed control structures exhibit excellent control performance for disturbances in feed flow and composition.The findings provide reference on energy-saving and control strategies for the industrial nitrogen trifluoride distillation process.关键词
精馏/纯化/分离/动态模拟Key words
distillation/purification/separation/dynamic simulation分类
化学化工引用本文复制引用
孟祥军,杨林睿,彭立培,杨献奎,花莹曦,张人仁,郑凯天,许春建..三氟化氮精馏分离流程的设计与控制[J].化工学报,2025,76(2):707-717,11.基金项目
国家科技重大专项(013ZX02401) （013ZX02401）
化学工程联合国家重点实验室自主研究课题(SKL-ChE-22T06) （SKL-ChE-22T06）
