电子学报2025，Vol.53Issue(1)：41-50,10.DOI:10.12263/DZXB.20240414
超高品质因子微棒腔的制备封装及传感应用
Fabrication,Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity
摘要
Abstract
As one of the important parameters of the whispering gallery mode(WGM)optical microcavity,the high quality factor means that the microcavity can have better characteristics and broader application prospects in the fields of nonlinear optics,coherent optical communication and microwave photonics.In order to improve the quality factor of the mi-crocavity,this paper controls the fabrication of the microcavity based on the automatic program,and optimized the polish-ing and annealing processes.The prepared silica microrod cavity has the characteristics of ultra-high quality factor,low cost and high efficiency,and the quality factor can reach up to 3×109.Based on the modular package scheme of integrated tem-perature control,the anti-interference ability of the microcavity coupling system is improved,and the frequency offset of one hour can be reduced by 10 times.With the ultra-low nonlinear threshold power(as low as 266 μW)brought by the ultra-high quality factor,this paper conducts sensing application experiments based on the Kerr optical frequency comb-generat-ed by the microrod cavity,and realizes the multi-mode ambient temperature sensing with a sensing sensitivity of 8.40 pm/℃and a measuring range of more than 30℃.The research results of this paper provide a powerful tool for high precision sens-ing,large capacity optical communication,low threshold laser and other applications.关键词
回音壁模式(WGM)/超高品质因子微腔/自动化制备/微腔封装/光频梳传感Key words
whispering gallery mode(WGM)/ultra-high quality factor microcavity/automatic fabrication/packaged microcavity/optical comb sensing分类
信息技术与安全科学引用本文复制引用
赵义轩,李昶,张璇,潘廷炀,段冰,杨大全..超高品质因子微棒腔的制备封装及传感应用[J].电子学报,2025,53(1):41-50,10.基金项目
北京市自然科学基金(No.Z210004) Natural Science Foundation of Beijing Municipality(No.Z210004) （No.Z210004）
