金刚石与磨料磨具工程2025，Vol.45Issue(1)：21-30,10.DOI:10.13394/j.cnki.jgszz.2023.0269
Si3N4陶瓷基底的交替多层金刚石薄膜摩擦学性能
Tribological performances of alternating multilayer diamond films on Si3N4 ceramic substrates
摘要
Abstract
Objectives:With the development of science and technology,silicon nitride ceramics have excellent phys-ical and chemical properties such as high strength,high hardness,high temperature resistance,corrosion resistance,and wear resistance.They can maintain good mechanical properties and chemical stability under harsh working conditions,and have been widely used in many fields.However,silicon nitride has great brittleness,low toughness,and poor plastic deformation ability,which makes it prone to cracking and brittle fracture under the action of stress.At the same time,the friction coefficient of silicon nitride ceramics,as wear-resistant devices,is high under dry friction conditions,and the loss caused by friction and wear will reduce its accuracy and affect the working stability of parts.The diamond film has the properties such as high hardness,low thermal expansion coefficient,low friction coefficient,and excellent chemical stability,making it an excellent anti-wear and wear-resistant film material.However,the two common single-layer dia-mond films have their own shortcomings.Therefore,diamond films with multilayer structures are designed and pre-pared on silicon nitride substrates to improve the tribological properties of silicon nitride ceramics.Methods:The single-layer and alternate multilayer diamond films with different structures were designed and prepared on silicon nitride ceramic substrates by hot filament chemical vapor deposition(HFCVD)technique.The surface and the cross-section morphology,crystal quality,crystal orientation,surface roughness,and phase compositions of single and alternate mul-tilayer diamond films were analyzed by scanning electron microscope,X-ray diffractometer,atomic force microscope,and Raman spectroscopy.Results:(1)For alternating multilayer films,the surfaces exhibit clustered nano-diamonds.When the number of alternations is small,the interlayer thickness is thick,the thin film is clearly layered,the layers are tightly connected,the surface roughness is small,and the film quality is good.When the number of alternations is more,the interlayer thickness is thin,the film does not have obvious layering,the surface roughness is large,and the film qual-ity is poor.The Raman spectra of the alternating multilayer structures are similar to those of the nano-diamond film,with a higher content of trans-polyacetylene and non-diamond phases in the film.(2)For alternating multilayer struc-tured films,the friction coefficients are generally lower than those of single-layer diamond films.When the number of alternations is small,the surface roughness of the film is reduced by the nano-diamond layer on the surface,and the tightly connected micro/nano interlocking structures and the micro-diamond layer at the bottom enhance the cohesion and bonding force of the film.The friction process of the film is stable,the wear rate of the film is low,and there is less film detachment during the friction process.When the number of alternations is high,the quality of the film is poor,and during the friction process,the film falls off and breaks,and the debris enters the friction surface of the film.The fric-tion coefficient fluctuates greatly,and the wear rate of the film is high.When the number of alternations is 4 and the number of film layers is 8,the film has the lowest average friction coefficient and wear rate,which are 0.016 and 1.04×10-7 mm3/(N·m),respectively.Conclusions:The surface morphology of diamond films has a significant impact on their tribological properties.The sharp(111)edge of the micro diamond film surface generates a strong plowing effect when interacting with the grinding ball,making it easier for diamond abrasive particles and debris to enter the grinding surface,resulting in an increase in friction coefficient and wear rate.The nano-grain size on the surface of the nano-dia-mond film is relatively small and has no sharp edges,which reduces the friction coefficient of the film.However,its bonding ability with the substrate is poor,and the partial detachment of the film under the shear stress increases the wear rate.The friction coefficient and the wear rate of alternating multilayer structures are generally reduced compared to single-layer diamond films.The reason is that the nano-diamond layer on the surface of the alternating structure reduces the surface roughness of the film,enhances its toughness,and the columnar growth of micro-diamond grains at the bot-tom of the film enhances the bonding performance between the film and the substrate,making the film less prone to peeling during friction.The crystalline quality of alternating multilayer thin films with thin interlayer thickness is poor,and the film rupture and peeling are prone to occur during the friction process,thereby increasing the friction coeffi-cient and the wear rate.A reasonable alternating multilayer structure design can significantly reduce the maximum fric-tion coefficient,the average friction coefficient,and the wear rate of the film during the friction process,reduce the plowing effect between the film and the wear pair,and reduce the wear scar area,thus improving the wear resistance of the film.关键词
热丝化学气相沉积法/金刚石薄膜/氮化硅/摩擦学性能Key words
hot filament chemical vapor deposition(HFCVD)/diamond films/silicon nitride/tribological perform-ances分类
化学工程引用本文复制引用
王贺,赵海根,闫广宇..Si3N4陶瓷基底的交替多层金刚石薄膜摩擦学性能[J].金刚石与磨料磨具工程,2025,45(1):21-30,10.基金项目
国家自然科学基金(51975388) （51975388）
学科创新引智项目(D18017) （D18017）
耐磨及功能薄膜制备与应用研究(G2022006012L) （G2022006012L）
陶瓷轴承材料基体复合涂层制备及其性能研究(2022JH2/101300234). （2022JH2/101300234）
