有色金属材料与工程2025，Vol.46Issue(1)：57-66,10.DOI:10.13258/j.cnki.nmme.20240323001
提高金属氧化物半导体气体传感器抗湿稳定性的方法研究
Research on the strategies to improve the moisture resistance stability of metal oxide semiconductor gas sensor
摘要
Abstract
Water vapor in the test environment will interfere with the gas-sensing response of metal oxide semiconductor gas-sensitive materials,leading to several issues such as baseline resistance drift and reduced response sensitivity,which significantly impacts the detection of target gases by sensors.The mechanism that water vapor interferes with gas sensitive reaction of the gas sensor is briefly described.The current ideas of moisture resistance detection are summarized emphatically.The moisture resistance detection ideas are widely developed,including screening effects,water trapping effects and sensor surface modulation.The combination of different moisture resistance ideas can realize the simultaneous improvement of moisture resistance stability and response performance of metal oxide semiconductor gas-sensitive materials.关键词
金属氧化物半导体/抗湿性能/吸附氧/气体传感器Key words
metal oxide semiconductor/moisture resistance/absorbed oxygen/gas sensor分类
计算机与自动化引用本文复制引用
刘新宽,邓志祥,吴郅轩,孙艳..提高金属氧化物半导体气体传感器抗湿稳定性的方法研究[J].有色金属材料与工程,2025,46(1):57-66,10.基金项目
上海市自然科学基金资助项目(23ZR1473300) （23ZR1473300）
