噪声与振动控制2025，Vol.45Issue(2)：243-249,7.DOI:10.3969/j.issn.1006-1355.2025.02.038
基于双内十字定子的压电宏微平面运动台研究
A Piezoelectric Macro-micro Planar Motion Platform Based on a Dual-inner-cross Stator
摘要
Abstract
To meet the demands of high-precision planar motion,a planar motion actuator driven by dual-inner-cross piezoelectric stator was proposed.The elliptical trajectory formed by coupling the in-plane and out-of-plane bending vibra-tion modes of the stator at the driving foot was utilized to drive the actuator along the x and y directions.The driving princi-ple of the actuator was presented.Based on ANSYS software,the finite element model of the stator was established,the structural dimension was optimized,the modal frequencies were simplified and merged into three frequencies of 27 457.5,27 704 and 27 601.3 Hz.The harmonic response analysis,transient analysis and the motion regulation analysis were carried out.Results of simulation show that under the condition of excitation voltage of 250 V and frequency of 27 344 Hz,the mea-sured vibration amplitudes at the driving foot are 1.5,1.4 and 1.6 μm in the x,y,and z directions respectively,and the mov-ing speed of the stator reaches 44.6 mm/s.The elliptical trajectory of the stator was simulated and the good kinetic perfor-mance of the actuator was verified.Finally,the stator fixing scheme was given,and the assembly structure of the actuator was designed.关键词
振动与波/平面运动驱动器/双内十字式定子/机电耦合模型/动力学分析Key words
vibration and wave/planar motion actuator/dual-inner-cross stator/electromechanical coupling model/dy-namics analysis分类
信息技术与安全科学引用本文复制引用
胡志鹏,李晨捷,潘文强,丁切,贺红林..基于双内十字定子的压电宏微平面运动台研究[J].噪声与振动控制,2025,45(2):243-249,7.基金项目
国家自然科学基金资助项目(52165008) （52165008）
江西省自然科学基金重点资助项目(NO.20202ACB202003) （NO.20202ACB202003）
